\u534a\u5bfc\u4f53\u5382\u6709\u54ea\u4e9b\u90e8\u95e8

\u5382\u52a1 \u8d22\u52a1 \u5de5\u7a0b \u8bbe\u5907 \u91c7\u8d2d \u7814\u53d1 \u5236\u9020 \u5e02\u573a \u5ba2\u670d \u54c1\u4fdd \u4eba\u529b\u8d44\u6e90\u90e8 \u751f\u4ea7\u7ba1\u7406

dry etch\u662f\u6bd4\u8f83\u7d2f\u7684\u90e8\u95e8\u4e4b\u4e00\uff0c\u505a\u64cd\u4f5c\u5de5\u5f88\u96be\u63a5\u89e6\u5230\u66f4\u6df1\u7684\u5de5\u827a\u53c2\u6570\uff0c\u53ea\u80fd\u5927\u6982\u4e86\u89e3\u4e00\u4e9b\u5de5\u827a\u5904\u7406\u8fc7\u7a0b\uff0c\u7528\u5fc3\u4e86\u89e3\u7684\u53ef\u4ee5\u5904\u7406\u4e00\u4e9b\u7b80\u5355\u5f02\u5e38\u3002\u8981\u60f3\u5b66\u5230\u66f4\u591a\uff0c\u8bf7\u5411\u5de5\u827a\u65b9\u5411\u53d1\u5c55